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![]() Entegris is a materials integrity management leader in high technology. Entegris products purify, protect, and transport critical materials within diverse industries such as semiconductor, data storage, chemical processing and fuel cell.
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Entegris offers a dynamic environment that values trust, integrity and accountability, people and teamwork, innovation and creativity, and excellence. Contact us for more information pertaining to open employment opportunitites. New Product & Technologies Impact® Duo - Dual Functionality Disposable Filters for Advanced Point-of-Use Photoresist FiltrationDeveloped from the Mykrolis® microcontamination control technologies, The Impact® Duo photochemical filters feature a dual-capture mechanism to prevent defect-causing particles from reaching the wafer. Upstream, a polyamide membrane provides nonsieving retention of defect-causing polar species. Downstream, the superior sieving technology of an ultra-high molecular weight polyethylene (UPE) membrane ensures a high level of retention and increases chemical compatibility. The Impact® Duo filters are available in 10 and 30 nm retention ratings. Available in both the Impact® Plus and the Impact® 2 configurations, these disposable filters feature Entegris' Connectology® design for rapid filter change-out. Entegris Featured in Semiconductor InternationalEntegris recently published an article with Brewer Science in Semiconductor International. Titled "Nanofiltration Maintains Photochemical Integrity", the article is authored by Entegris' Haizheng Zhang, Aiwen Wu, Jian Wei and Brewer Science's Ryan Buschjost. The article focuses on the results of a joint-study on the advancement of nanofiltration of BARC (bottom antireflective coatings) materials in lithography applications. To learn more about Entegris products, download the following brochures - Impact® 2 Disposable Filters and Impact® Plus Disposable Filters |



